A high current vacuum discharge for triode-sputtering in the 10−4 torr range
- 1 June 1967
- Vol. 17 (6) , 325-327
- https://doi.org/10.1016/0042-207x(67)92178-1
Abstract
No abstract availableThis publication has 1 reference indexed in Scilit:
- Efficient Low Pressure Sputtering in a Large Inverted Magnetron Suitable for Film SynthesisReview of Scientific Instruments, 1965