A review of microfabrication technologies: Application to X-ray optics

• 1 October 1991
• journal article
• review article
• Published by Elsevier in Journal of X-Ray Science and Technology
• Vol. 3  (1) , 45-67
• https://doi.org/10.1016/0895-3996(91)90011-t

Abstract

Keywords

• X RAY OPTICS