Raman scattering study of plasma etching damage in GaAs

• 1 November 1986
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B
• Vol. 4  (6) , 1316-1318
• https://doi.org/10.1116/1.583512

Abstract

Keywords

• SPECTROSCOPY
• RAMAN SPECTROSCOPY
• MATERIALS SCIENCE
• RAMAN SPECTRA
• ARSENIC
• PLASMA ETCHING
• ETCHING
• SPECTRA
• RAMAN SCATTERING
• LASER SPECTROSCOPY