Morphology and structure of gold, silver and copper layers obtained by sputtering during ion bombardment of targets from these metals
- 29 February 1988
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 157 (2) , 315-323
- https://doi.org/10.1016/0040-6090(88)90012-0
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- A search for a thermal spike effect in sputtering. I. Temperature dependence of the yield at low-kev, heavy-ion bombardmentRadiation Effects, 1982
- Transmission sputtering as a technique for measuring the distribution of energy deposited in solids by ion bombardmentRadiation Effects, 1976
- Transmission Sputtering of Thin Films by Low-Energy Hydrogen IonsJournal of Applied Physics, 1968