Magnetic force microscope combined with a scanning electron microscope

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Abstract
A magnetic force microscope (MFM) using frequency modulation detection was combined with a scanning electron microscope (SEM). The first goal was to facilitate the selection of the MFM imaging field by positioning the magnetic tip using the SEM. The second goal was to improve the performance of the MFM by operating it in a vacuum. The efficiency of the combined SEM was proved by imaging the particular region (about 3 μm in length) on the sample. The improved features of a MFM operated in a vacuum were demonstrated by comparing images taken in air and in a vacuum. The lateral resolution was improved to 50 nm in a vacuum while it was 100 nm in air, although that resolution could possibly be due to atomic force. The dependence of the MFM image on the tip to sample spacing is discussed also.

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