Comparison of the chemical structure and composition between N2O oxides and reoxidized NH3-nitrided oxides
- 28 February 1994
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 64 (9) , 1168-1170
- https://doi.org/10.1063/1.111951
Abstract
The chemical structure and composition of ultrathin N2O oxides have been investigated using angle resolved x‐ray photoelectron spectroscopy and compared to those of reoxidized NH3‐nitrided SiO2. It is found that N2O oxide shows a second nitrogen‐related bond (N—O bonds) in close proximity to the SiO2/Si interface in addition to the typically observed Si—N bonds in reoxidized NH3‐nitrided SiO2. In addition, the change of the difference between Si 2p and O 1s binding energies in the N2O oxide and reoxidized NH3‐nitrided SiO2 with the take‐off angle is negligible due to the interfacial nitrogen incorporation.Keywords
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