ELLIPSOMETRIC STUDY OF a-Si:H NUCLEATION, GROWTH, AND INTERFACES

• 1 January 1989
• book chapter
• Published by World Scientific Pub Co Pte Ltd
• p. 1003-1044
• https://doi.org/10.1142/9789814434157_0036

Abstract

Keywords

• EVOLUTION
• NUCLEATION
• SURFACE ROUGHNESS
• BEHAVIOR
• ELLIPSOMETRY
• MICROSTRUCTURAL
• FORMATION
• DEPOSITION