Effects of Grown-ln and Process-Induced Defects in Single Crystal Silicon

• 1 January 1972
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 119  (2) , 255
• https://doi.org/10.1149/1.2404171

Abstract

Keywords

• INDUCED DEFECTS
• GROWN LN
• CRYSTAL SILICON
• PROCESS INDUCED
• SINGLE CRYSTAL