A 4.4 GHz SAW Filter Using a Single-Crystal ZnO Film on Sapphire
- 1 January 1981
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- 2.2 GHz SAW Filters Using ZnO/Al2O3 StructureJapanese Journal of Applied Physics, 1981
- Structures and SAW properties of rf-sputtered single-crystal films of ZnO on sapphireJournal of Applied Physics, 1980
- Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputteringApplied Physics Letters, 1980
- High rate epitaxial growth of ZnO films on sapphire by planar magnetron rf sputtering systemJournal of Crystal Growth, 1978
- Higher Order Mode Rayleigh Waves Propagating on ZnO/Substrate StructuresPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1977
- Surface Acoustic Wave Multielectrode TransducersIEEE Transactions on Sonics and Ultrasonics, 1975
- Evaluation of AlN Films on Sapphire for Surface Acoustic Wave ApplicationsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,1975
- Investigation of the surface acoustic wave properties of heteroepitaxial ZnO layers on Al2O3Journal of Applied Physics, 1972