Simple, low cost, and highly stable Pd evaporation source for use in UHV
- 1 September 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 21 (3) , 899-900
- https://doi.org/10.1116/1.571846
Abstract
The design of a source for the thermal evaporation of Pd from a resistively heated W filament in UHV is presented. The source’s main advantages are its simplicity, low cost, long lifetime, and stability at low deposition rates.Keywords
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