Integrated true RMS converter

Abstract
A novel type of thermal converter based on thermopiles fabricated in silicon planar technology with the standard bipolar process is presented. At 10 MHz an ac-dc difference of less then 500 ppm has been measured. The temperature coefficient of the device is measured to vary smoothly from approximately +500 ppm k at 25°C to approximately −800 ppm k at 100°C.

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