Comparison of the Properties of Molybdenum Silicide Films Deposited by D‐C Magnetron and RF Diode Co‐Deposition
- 1 March 1981
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 128 (3) , 562-567
- https://doi.org/10.1149/1.2127458
Abstract
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