SU8-micromechanical structures with in situ fabricated movable parts

• 1 August 2002
• journal article
• research article
• Published by Springer Nature in Microsystem Technologies
• Vol. 8  (4-5) , 348-350
• https://doi.org/10.1007/s00542-002-0171-0

Abstract

Keywords

• ASPECT RATIO
• APPLICATION POTENTIAL
• FILM THICKNESS
• MECHANICAL INTERACTION
• CHECK VALVE