An o-ring-sealed rotary feedthrough for UHV applications
- 1 November 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 21 (4) , 1031
- https://doi.org/10.1116/1.571857
Abstract
A differentially pumped o-ring-sealed rotary feedthrough for ultrahigh vacuum applications is described. Its simplified design results in a significant reduction of machining requirements, compared to previous designs.Keywords
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