An Electrodiffusion Apparatus for Solid Semiconductors
- 1 March 1969
- journal article
- research article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 40 (3) , 422-424
- https://doi.org/10.1063/1.1683963
Abstract
An apparatus has been developed for the study of the influence of applied electric fields and currents on solid state diffusion of impurities in semiconductors. Special features of the apparatus are simple procedures, versatility, and allowance for determination of impurity profiles.Keywords
This publication has 3 references indexed in Scilit:
- Mechanism of Gold Diffusion into SiliconJournal of Applied Physics, 1964
- Influence of Copper and Vanadium on the Sintering of Magnesium-Type FerritesJournal of Applied Physics, 1957
- Electrolysis of copper in solid siliconJournal of Physics and Chemistry of Solids, 1957