Determination of the thermal conductivity of CMOS IC polysilicon
- 1 April 1994
- journal article
- Published by Elsevier in Sensors and Actuators A: Physical
- Vol. 41 (1-3) , 161-164
- https://doi.org/10.1016/0924-4247(94)80106-1
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A Microstructure For Measurement Of Thermal Conductivity Of Polysilicon Thin FilmsJournal of Microelectromechanical Systems, 1992
- Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon filmsJournal of Applied Physics, 1988