Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays
- 25 August 2005
- conference paper
- Published by Institute of Electrical and Electronics Engineers (IEEE)
- Vol. 1, 831-834
- https://doi.org/10.1109/sensor.1995.717361
Abstract
No abstract availableKeywords
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- Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processingIEEE Electron Device Letters, 1993