Carrier Lifetime Reduction in Silicon by Proton Implantation Through MOS Structures
- 1 November 1984
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 131 (11) , 2679-2683
- https://doi.org/10.1149/1.2115382
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: