Ab-Initio Investigations on Diffusion of Halogen Atoms in GaAs

• 1 December 1997
• journal article
• Published by Trans Tech Publications, Ltd. in Materials Science Forum
• Vol. 258-263, 1821-1826
• https://doi.org/10.4028/www.scientific.net/msf.258-263.1821

Abstract

Keywords

• AB INITIO CALCULATION
• CHLORINE
• DIFFUSION
• FLUORINE
• GAAS
• HALOGEN
• PASSIVATION