Design and fabrication process for electrostatic side-drive motors
- 1 March 1995
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 5 (1) , 11-17
- https://doi.org/10.1088/0960-1317/5/1/003
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
- Piezoelectric micromotors for microrobotsJournal of Microelectromechanical Systems, 1992
- Silicon-processed overhanging microgripperJournal of Microelectromechanical Systems, 1992
- Fabrication and testing of the planar magnetic micromotorJournal of Micromechanics and Microengineering, 1991
- A design overview of an eccentric-motion electrostatic microactuator (the wobble motor)Sensors and Actuators, 1989
- IC-processed electrostatic synchronous micromotorsSensors and Actuators, 1989
- Integrated fabrication of polysilicon mechanismsIEEE Transactions on Electron Devices, 1988