In situ monitoring of metal multilayer growth by optical reflectometry

• 1 December 1994
• journal article
• Published by SPIE-Intl Soc Optical Eng in Optical Engineering
• Vol. 33  (12) , 3969-3973
• https://doi.org/10.1117/12.184439

Abstract

Keywords

• OPTICAL REFLECTOMETRY
• SITU MONITORING
• MONITORING OF METAL
• GROWTH BY OPTICAL
• METAL MULTILAYER GROWTH