Replication techniques for diffractive optical elements
- 1 December 1997
- journal article
- Published by Elsevier in Microelectronic Engineering
- Vol. 34 (3-4) , 321-339
- https://doi.org/10.1016/s0167-9317(97)00189-5
Abstract
No abstract availableKeywords
This publication has 11 references indexed in Scilit:
- Coated submicron gratings for broadband antireflection in solar energy applicationsJournal of Modern Optics, 1996
- Imprint Lithography with 25-Nanometer ResolutionScience, 1996
- Imprint of sub-25 nm vias and trenches in polymersApplied Physics Letters, 1995
- Harmonic diffractive lensesApplied Optics, 1995
- Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresistsOptical Engineering, 1994
- One-step 3D shaping using a gray-tone mask for optical and microelectronic applicationsMicroelectronic Engineering, 1994
- Diffraction, beauty and commercePhysics World, 1989
- Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)Microelectronic Engineering, 1986
- Video disc mastering and replicationOptics & Laser Technology, 1977
- HoloTape®: A Low-Cost Prerecorded Television System Using Holographic StorageJournal of the SMPTE, 1973