Dependence of A-Si:H Tfts Performances on Deposition and Process Parameters
- 1 January 1985
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A study of hydrogenated amorphous silicon deposited by hot-wall glow dischargeJournal of Applied Physics, 1985
- Application of amorphous silicon field effect transistors in addressable liquid crystal display panelsApplied Physics A, 1981