Abstract
We present some microscopic (atomic scale) structure analysis for Poisson-distributed impurities in semiconductors. Relevant concepts and results, well established in the area of geometrical probability, are employed in the analysis. Monte Carlo results for the distribution of "impurity-cluster" sizes in semiconductor media approximated by their continuum representation are also presented. A closed-form expression for the "impurity-doublet" probability and a general formulation for the impurity-cluster size distribution are also provided.