Preparation of a New Photodegradable Copolymer LB Film and Its Application to Photopatterning
- 1 June 2000
- journal article
- Published by Oxford University Press (OUP) in Chemistry Letters
- Vol. 29 (6) , 608-609
- https://doi.org/10.1246/cl.2000.608
Abstract
A new type of copolymer LB film containing a photodegradable monomer, tert-butyl 4-vinylphenyl carbonate (tBVPC), was prepared. It was found that the p(DDA/tBVPC) LB film could be efficiently decomposed by deep UV irradiation. After development with an alkali solution a positive-tone pattern could be drawn with a high resolution of 0.75 µm.This publication has 10 references indexed in Scilit:
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