Investigation on the O3 sensitivity properties of WO3 thin films prepared by sol–gel, thermal evaporation and r.f. sputtering techniques
- 25 May 2000
- journal article
- Published by Elsevier in Sensors and Actuators B: Chemical
- Vol. 64 (1-3) , 182-188
- https://doi.org/10.1016/s0925-4005(99)00504-3
Abstract
No abstract availableKeywords
This publication has 9 references indexed in Scilit:
- Investigation on the cross sensitivity of NO2 sensors based on In2O3 thin films prepared by sol-gel and vacuum thermal evaporationThin Solid Films, 1999
- Characterization of sol-gel prepared WO3 thin films as a gas sensorJournal of Vacuum Science & Technology A, 1999
- Physical and structural characterization of tungsten oxide thin films for NO gas detectionThin Solid Films, 1998
- In2O3 and MoO3–In2O3 thin film semiconductor sensors: interaction with NO2 and O3Sensors and Actuators B: Chemical, 1998
- Spin-coated thin films of SiO2–WO3 composites for detection of sub-ppm NO2Sensors and Actuators B: Chemical, 1997
- Gas-sensing applications of W–Ti–O-based nanosized thin films prepared by r.f. reactive sputteringSensors and Actuators B: Chemical, 1997
- Microstructural characterization of a titanium-tungsten oxide gas sensorJournal of Materials Research, 1997
- Cross sensitivity and stability of NO2 sensors from WO3 thin filmSensors and Actuators B: Chemical, 1996
- Highly sensitive ozone sensorSensors and Actuators B: Chemical, 1993