X-ray lithography — A review and assessment of future applications

• 1 January 1980
• journal article
• review article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 17  (1) , 533-535
• https://doi.org/10.1116/1.570502

Abstract

Keywords

• FUTURE APPLICATIONS
• X RAY LITHOGRAPHY
• ASSESSMENT
• REVIEW