Use of Ga in metal-GaAs contacts to eliminate large As loss peaks

19 June 1980

journal article
Published by Institution of Engineering and Technology (IET) in Electronics Letters

Vol. 16 (13) , 504-505
https://doi.org/10.1049/el:19800352

Abstract

Arsenic losses from Schottky and ohmic metal contacts to GaAs were quantitatively determined by a quadrupole mass spectrometer as a function of linearly increasing temperature. By adding gallium to the contact metal, the giant peaks found in the arsenic losses could be completely eliminated and the arsenic evaporation losses greatly reduced.

Keywords

OHMIC METAL CONTACTS
QUADRUPOLE MASS SPECTROMETER
SCHOTTKY CONTACTS
AS LOSS
GAAS
EVAPORATION LOSSES

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