Gas phase monitoring of reactions under InP MOVPE growth conditions for the decomposition of tertiarybutyl phosphine and related precursors
- 1 November 1992
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 124 (1-4) , 49-55
- https://doi.org/10.1016/0022-0248(92)90436-m
Abstract
No abstract availableKeywords
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