Ion beam induced wafer charging
- 1 February 1989
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 37-38, 559-562
- https://doi.org/10.1016/0168-583x(89)90246-2
Abstract
No abstract availableThis publication has 3 references indexed in Scilit:
- Effect of high intrinsic ion concentrations on electron energies in solid solutions of III–V and II–VI semiconductorsSolid-State Electronics, 1985
- Beam transportRadiation Effects, 1979
- Theoretical and experimental study of space charge in intense ion beamsPhysical Review A, 1979