In quest of nm accuracy: supporting optical metrology by rigorous diffraction theory and AFM topography
- 1 April 1995
- journal article
- Published by Elsevier in Optics Communications
- Vol. 115 (5-6) , 568-575
- https://doi.org/10.1016/0030-4018(94)00673-i
Abstract
No abstract availableKeywords
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