Evaluation of adjustment data for simple ellipsometers
- 15 August 1979
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 61 (3) , 335-340
- https://doi.org/10.1016/0040-6090(79)90478-4
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- A refined oxidation-stripping technique of thin n-type Si filmsRadiation Effects, 1969
- Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometryJournal of Research of the National Bureau of Standards Section A: Physics and Chemistry, 1963