A quick survey method for the study of CVD conditions
- 1 March 1978
- journal article
- Published by Elsevier in Journal of Crystal Growth
- Vol. 43 (2) , 264-266
- https://doi.org/10.1016/0022-0248(78)90177-x
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Chemical vapor deposition of tantalum nitride filmsJournal of the Less Common Metals, 1977
- Crystal growth of titanium nitride by chemical vapor depositionJournal of Crystal Growth, 1975
- Deposition of Titanium Nitride by Vapor Phase ReactionNIPPON KAGAKU KAISHI, 1974