Investigation of plasma immersion ion implanted surfaces by instrumented indentation
- 30 September 1996
- journal article
- Published by Elsevier in Surface and Coatings Technology
- Vol. 83 (1-3) , 243-249
- https://doi.org/10.1016/0257-8972(95)02826-9
Abstract
No abstract availableKeywords
This publication has 14 references indexed in Scilit:
- Measurements of potentials and sheath formation in plasma immersion ion implantationJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 1994
- Measurement methods in surface engineeringSurface Engineering, 1993
- Comparative Measurement of Indentation Fracture Toughness with Berkovich and Vickers IndentersJournal of the American Ceramic Society, 1992
- An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experimentsJournal of Materials Research, 1992
- Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materialsSurface and Coatings Technology, 1988
- Plasma immersion ion implantation using plasmas generated by radio frequency techniquesApplied Physics Letters, 1988
- Plasma source ion-implantation technique for surface modification of materialsJournal of Applied Physics, 1987
- Hardness measurement at penetration depths as small as 20 nmPhilosophical Magazine A, 1983
- Ion implantation in tribology and corrosion scienceJournal of Vacuum Science and Technology, 1978
- Ion implantation and surface modification in tribologyWear, 1975