Surface topography and step orientation during metalorganic vapor phase epitaxy of InP

• 20 March 1995
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 66  (12) , 1472-1474
• https://doi.org/10.1063/1.113658

Abstract

Keywords

• INDIUM PHOSPHIDES
• VAPOR PHASE EPITAXY
• SURFACE STRUCTURE
• TOPOGRAPHY
• MORPHOLOGY
• LIGHT SCATTERING
• DIFFUSE SCATTERING
• IN−SITU PROCESSING