Influence of negative ions in rf glow discharges inat 13.56 MHz
- 1 September 1990
- journal article
- research article
- Published by American Physical Society (APS) in Physical Review A
- Vol. 42 (6) , 3674-3677
- https://doi.org/10.1103/physreva.42.3674
Abstract
New experimental evidence of the plasma structure has been presented in the rf glow discharge in at 13.56 MHz by spatiotemporal emission spectroscopy. Theoretical estimation by the relaxation continuum model strongly supports the accumulative effect of the negative ion, , by the electron attachment in the bulk plasma due to the potential barriers in the positive-ion sheath on the discharge structure.
Keywords
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