Vectorized Monte Carlo calculation for the transport of ions in amorphous targets
- 1 September 1983
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 30 (9) , 1011-1017
- https://doi.org/10.1109/t-ed.1983.21255
Abstract
This paper describes the vectorized implantation of a Monte Carlo technique to simulate the transport of energetic ions in amorphous targets. Utilizing the vector processing capabilities of a CRAY-1 computer, we have achieved speed-up factors between three to ten over equivalent scalar implementations. The method has been successfully applied to simulate typical ion-implant conditions in modern silicon device processing.Keywords
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