Modeling and simulation of plasma processes
- 9 December 2002
- proceedings article
- Published by Institute of Electrical and Electronics Engineers (IEEE)
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Particle simulations of radio-frequency glow dischargesIEEE Transactions on Plasma Science, 1991
- Particle-in-cell charged-particle simulations, plus Monte Carlo collisions with neutral atoms, PIC-MCCIEEE Transactions on Plasma Science, 1991
- Structured ion energy distribution in radio frequency glow-discharge systemsApplied Physics Letters, 1989