Ion implantation process modelling
- 1 January 1983
- Vol. 33 (1) , 125-128
- https://doi.org/10.1016/0042-207x(83)90544-4
Abstract
No abstract availableKeywords
This publication has 1 reference indexed in Scilit:
- Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92, E(4He) = 400–4000 keVAtomic Data and Nuclear Data Tables, 1974