Heteroepitaxial Growth of Tungsten Carbide Films on W(110) by Plasma-Enhanced Chemical Vapor Deposition

Abstract
Tungsten carbide (WC) layers have been grown epitaxially on tungsten single crystals for the first time by using microwave plasma and electron cyclotron resonance plasma carburization of single-crystalline tungsten. WC on tungsten is grown epitaxially as (0001)WC|| (110)W in the alignment [1\bar210]WC|| [\bar111]W.