Zn Diffusion into AlGaAsSb and Its Application to APD's

Abstract
Vapor-phase Zn diffusion into n-type GaSb and AlGaAsSb at temperatures of 500°C–540°C with Zn-Sb and Zn-As compounds as diffusion sources was studied. Zn diffusion was carried out with good reproducibility and flat diffusion fronts were obtained. Zn-diffused AlGaAsSb APD's were fabricated and small dark currents were obtained compared with those of our previously-reported grown junction APD's.
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