Effect of an Interfacial Ti Layer on the Formation of CoSi₂ on Si

Publisher Website

1 January 1991

journal article
Published by Springer Nature in MRS Proceedings

Vol. 238
https://doi.org/10.1557/proc-238-575

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

Growth of epitaxial CoSi2 on (100)Si
Applied Physics Letters, 1991