Adaptation of an ion implanter on a 100 kV electron microscope for in situ irradiation experiments
- 1 November 1978
- journal article
- Published by IOP Publishing in Journal of Physics E: Scientific Instruments
- Vol. 11 (11) , 1125-1128
- https://doi.org/10.1088/0022-3735/11/11/013
Abstract
An ion implanter with high mass resolution has been connected to a conventional electron microscope. Preliminary results on the evolution of defect clusters created by ions of 10-50 keV in Ni are given. The resolution achieved is better than 1.5 nm for irradiation temperatures above 90K, using conventional holders. In the temperature range 20-100K irradiation experiments are performed using a liquid-helium-cooled holder built in the laboratory. The resolution is then about 3 nm.Keywords
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