A comparison of pumping speed measurement methods

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Abstract
In order to reconcile differences in ion pump speeds reported by American and European users, a comparison of pumping speed measurements using the Fischer-Mommsen [E. Fischer and H. Mommsen, Vacuum 17, 309 (1967)] method and the 3-gauge conductance tube method [Apparatus of AVS tentative standard 4.1, Suppl. III (b)] was made using a pump with a speed of about 230 liter/sec. The results were checked against a third technique—the measurement of time required to exhaust a pipette of known volume and known initial pressure with the pump chamber pressure held constant. The pipette method and the Fisher-Mommsen method agree and the 3-gauge method results in speeds about 8% higher. Data are presented showing the advantages and disadvantages of measuring pumping speeds with pure gases and with gas mixtures such as air.

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