A new approach for computing diode sputter-ion pump characteristics
- 1 November 1974
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 11 (6) , 1154-1159
- https://doi.org/10.1116/1.1318701
Abstract
By using theoretical considerations combined with experimental results, a general approach for computing sputter-ion pump characteristics is given. This approach can be successfully applied to optimal design of distributed sputter-ion pumps in high energy accelerators. The deviation between computed and measured pumping speed values is less than 30%.Keywords
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