Hydrogenation and dehydrogenation of amorphous and crystalline silicon
- 1 April 1978
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 32 (7) , 439-441
- https://doi.org/10.1063/1.90078
Abstract
The dehydrogenation of amorphous silicon leaves dangling bonds which can be rehydrogenated by exposure to atomic H, but not to undissociated H2. The hydrogenation of dangling bonds in crystalline Si was monitored via the I (V) characteristics of a p‐n junction.Keywords
This publication has 3 references indexed in Scilit:
- Photoluminescence of hydrogenated amorphous siliconApplied Physics Letters, 1977
- Quantitative analysis of hydrogen in glow discharge amorphous siliconApplied Physics Letters, 1977
- Hydrogen chemisorption on the silicon (110) 5×1 surfaceJournal of Vacuum Science and Technology, 1976