Stress Gradients and Anisotropy in Thin Films

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Abstract
Indications that steep through-thickness strain gradients occur in vapour-deposited chromium films stemming from previous observations of film curling during spontaneous delamination from substrates, have been substantiated by analysis and simulation of Bragg X-Ray diffraction peaks. The presence of large through-thickness compressive strains, that increase quadratically with distance from the substrate from about zero at the interface to around 0.8% at the film surface, was deduced by empirical computer matching of diffraction peak shapes.

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