Effect of Coating on the Plasma Chamber Wall in RIKEN Electron Cyclotron Resonance Ion Source

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Abstract
The beam intensities of carbon, nitrogen, and argon ions from the RIKEN ECR (electron cyclotron resonance) ion source were measured before and after producing aluminum and magnesium ions. Aluminum and magnesium ions were produced by radially inserting a ceramic rod (Al2O3, MgO) into the plasma in the second stage of the ECR ion source. It has been observed that the beam intensities of higher-charge-state ions are enhanced after producing aluminum and magnesium ions. This is supposed to be due to the effect of the coating of aluminum and magnesium oxide on the plasma chamber wall.

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