Analysis of superposition errors in wafer fabrication

• 1 January 1977
• journal article
• Published by Elsevier in Microelectronics Reliability
• Vol. 16  (2) , 173-176
• https://doi.org/10.1016/0026-2714(77)90420-6

Abstract

Keywords

• ANALYSIS OF SUPERPOSITION
• SUPERPOSITION ERRORS
• ERRORS IN WAFER FABRICATION