Equipment of a 3-inch silicon molecular beam epitaxial system with scanning tunneling microscopy
- 30 December 1989
- journal article
- Published by Elsevier in Thin Solid Films
- Vol. 183 (1-2) , 339-344
- https://doi.org/10.1016/0040-6090(89)90459-8
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Investigation of silicon in air with a fast scanning tunneling microscopeJournal of Vacuum Science & Technology A, 1988
- An easily operable scanning tunneling microscopeSurface Science, 1987
- Structural analysis of Si(111)-7×7 by UHV-transmission electron diffraction and microscopyJournal of Vacuum Science & Technology A, 1985